Boat Receiver is specifically used in the Pre-Annealing Machine and ALD (Atomic Layer Deposition) Machine in the solar cell manufacturing industry.
Pre-Annealing Machine: Holds and transfers the quartz wafer boat carrying solar cells. Ensures stability during thermal treatment before main diffusion or passivation.
ALD Machine: Acts as the interface for moving wafer boats into the ALD chamber. Provides precise alignment to ensure uniform thin film deposition (like Al₂O₃ layers for passivation).
In solar/semiconductor lines, a “boat” usually means a quartz or graphite tray/holder that carries wafers or cells into a machine (like an RT dryer, RTP system, or diffusion furnace).A “boat receiver” would then be the loading/unloading mechanism or slot in the RT machine where the boat is placed and aligned before processing.
Pre-annealing machines and ALD (atomic layer deposition) machines in the solar cell manufacturing industry.
Pre-Annealing Machine: Provides support and positioning for the cassette that holds silicon wafers before thermal processing. Ensures stable transfer into the annealing chamber.
ALD Machine: Acts as a guiding and alignment pin for wafer cassettes during atomic layer deposition (e.g., Al₂O₃ or SiNₓ passivation layers). Maintains precise positioning so wafers receive uniform coating.
Provides support and positioning for the cassette that holds silicon wafers before thermal processing. Ensures stable transfer into the annealing chamber. Acts as a guiding and alignment pin for wafer cassettes during atomic layer deposition (e.g., Al₂O₃ or SiNₓ passivation layers).Maintains precise positioning so wafers receive uniform coating.
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