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Boat Receiver is specifically used in the Pre-Annealing Machine and ALD (Atomic Layer Deposition) Machine in the solar cell manufacturing industry.

Pre-Annealing Machine: Holds and transfers the quartz wafer boat carrying solar cells. Ensures stability during thermal treatment before main diffusion or passivation.

ALD Machine: Acts as the interface for moving wafer boats into the ALD chamber. Provides precise alignment to ensure uniform thin film deposition (like Al₂O₃ layers for passivation).

 

 

In solar/semiconductor lines, a “boat” usually means a quartz or graphite tray/holder that carries wafers or cells into a machine (like an RT dryer, RTP system, or diffusion furnace).A “boat receiver” would then be the loading/unloading mechanism or slot in the RT machine where the boat is placed and aligned before processing.